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              Horizontal PECVD (Two-In-One)
              
    
              
        
              PRODUCTS AND SERVICES > Horizontal Furnaces Series > Horizontal PECVD (Two-In-One) 
              
        
              
            
              
                
              
                    



              
            
              
        

              
    
                
              
            
              
            
              
                
              
    
              
                    
                
                                    
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                                Horizontal PECVD (Two-In-One)                            
              
                        
              
                        
              AlOx+SiN deposition.
              
                                            
              
                    
              
                        
              
                                                                                                            
              
                                            
              
                                    
              
                
              
            
              
        
              
        
              
            
              
                
    

              
                                        
              Equipment Name:
              Horizontal PECVD (Two-In-One)

              Equipment Model:
              PD-520/PD-520L/PD-520MAX

              Equipment Application:
              AlOx+SiN deposition.

              Features:

              1、The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  
              2、Optimal throughout solution: two-in-one configuration. 

              Parameters: